The Cluster Tool Simulation Group combines Systems Engineering and Operations Research concepts to model and analyze the scheduling of cluster tools used in the semiconductor processing industry. We recently worked with the System Architectures Laboratory in a recipe scheduling project for an Implant tool. Information about this project can be found on this website.
Claire Gryphon - Graduated from George Mason University with a BS in Electrical Engineering in May 2011, and is currently pursuing an MS in Systems Engineering.
Luis Ayala - Graduated from George Mason University with a BS in Electrical Engineering in May 2011, and is currently pursuing a MS in Systems Engineering.
Muhaimeinul Khan - Currently pursuing a MS in Systems Engineering.
Tariq Hanif- Currently pursuing a MS in Systems Engineering.
Initially our sponsor was Micron Technology. However, we had to change our sponsor five weeks before the project was due because the legal procedures to continue working with them would take too long for us to finish the project on time. As a result, the Systems Architectures Laboratory (SAL) at George Mason University became our client. SAL conducts research in the modeling, design and evaluation of architectures for information systems, and they are currently working on issues in semiconductor processing with Micron Technology. The Systems Architectures Laboratory is interested in the analysis of cluster tools to improve process performance, therefore their goals, closely relate to our project. It should be noted that although Micron Technology is no longer our project sponsor, it is still a current stakeholder.